Primary tabs
- Metamaterials for High Frequency Applications.
- Microwave components, focus on RF MEMS and NEMS.
- Microwave and Millimeter Wave Components for Space and Security.
- Scanning Microwave Microscopy for Material Science
Romolo Marcelli was born in Roma, Italy, on February 26, 1958. He obtained the degree in Physics at the University of Roma "La Sapienza" in 1983. From 1987 he is with the National Research Council (CNR) of Italy, and from 1998 with the Institute for Microelectronics and Microsystems (IMM) of CNR. Presently, he is Research Director and Responsible of the Research Line on High Frequency Microsystems: Technologies and Reliability for Ground and Space Applications at CNR-IMM Roma. He was also Deputy Director at IMM Roma of the IMM Director from October 2006 to May 2014. Romolo Marcelli is member of the IEEE since 1995, and Senior Member since 2022. Membershisp is extended to the IEEE Magnetism and Microwave Theory and Techniques Societies. He is also member of the American Physical Society and was member of the Administrative Committee for the IEEE Magnetics Society from 1995 to 1997. His past and current interests include technologies, design and test activities in Microwave Magnetics and RF MEMS. Currently, he is also involved in Microwave Imaging and Metamaterials at Microwave and Millimeter Wave Frequencies. In this framework, he also managed several national and international industrial and academic contracts, and he served as organizer and committee member in workshops and conferences. Romolo Marcelli is Referee for several journals in the fields of interest. He is Editor of two books on the linear and non-linear properties of magnetic microwave devices, and co-author of more than two hundred international papers and conference contributions on microwave magnetic devices, RF MEMS and Microwave Scanning Microscopy. Specialties: R&D Management
Scientific Productions
Improved Design of Metamaterial Resonating Filters Driven by RF MEMS Switches
2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) [IEEE], Pages: 1-4
RF MEMS switched K-Band Sierpinski resonators
2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) [IEEE], Pages: 1-4
U-shaped MEMS tunable microwave resonators
2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) [IEEE], Pages: 1-5
EMBG Magnetostatic Wave Band Stop Resonators
2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) [IEEE], Pages: 1-5
Near field microwave microscopy for MEMS and micro-electronic device characterization
2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) [IEEE], Pages: 1-4
Near-field microwave techniques for micro-and nano-scale characterization in materials science
2017 International Semiconductor Conference (CAS) [IEEE], Pages: 29-36
A coplanar waveguide microfluidic sensor for a micrometric local spectroscopy of liquid solutions
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) [IEEE], Pages: 1-4
Microwave broadband characterization of aging of SU-8 polymer as CPW substrate
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) [IEEE], Pages: 1-4
RF MEMS fabrication in LTCC technology
2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) [IEEE], Pages: 1-5
Wafer-level thin film micropackaging for RF MEMS applications
2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) [IEEE], Pages: 1-5
Scanning microwave microscopy for non-destructive characterization of SOI wafers
2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) [IEEE], Pages: 238-241
2015 European Microwave Conference (EuMC) [IEEE], Pages: 654-657
2015 European Microwave Conference (EuMC) [IEEE], Pages: 159-162
Analytical evaluation of the capacitance of a conical sensor for micro-nano imaging techniques
2015 6th International Workshop on Advances in Sensors and Interfaces (IWASI) [IEEE], Pages: 283-287
Tailoring design and fabrication of capacitive RF MEMS switches for K-band applications
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems [SPIE], Volume: 9517 Pages: 183-190
Nanoscale characterization of MOS systems by microwaves: Dopant profiling calibration
EUROSOI-ULIS 2015: 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon [IEEE], Pages: 269-272
Switch Matrix for Space Applications Based on RF MEMS
1st URSI Atlantic Radio Science Conference (URSI AT-RASC) [],
An innovative procedure for the synthesis of MEMS capacitive switches
2014 International Semiconductor Conference (CAS) [IEEE], Pages: 175-178
Compact 12× 12 Switch Matrix integrating RF MEMS switches in LTCC hermetic packages
2014 44th European Microwave Conference [IEEE], Pages: 199-202
Analytic design method for distributed RF MEMS phase shifters
2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) [IEEE], Pages: 1-3
An analytic approach for the synthesis of RF MEMS capacitive switches
2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) [IEEE], Pages: 1-4
RF MEMS based switch matrix for space applications
Kleinheubacher Tagung [],
A novel approach for the synthesis of composite right/left-handed circuits
CAS 2011 Proceedings (2011 International Semiconductor Conference) [IEEE], Volume: 1 Pages: 199-202
Broadband and small size 3-port semi-lumped differential phase shifter
CAS 2011 Proceedings (2011 International Semiconductor Conference) [IEEE], Volume: 1 Pages: 173-176
Composite right/left handed based 3-port broadband differential phase shifter
2011 41st European Microwave Conference [IEEE], Pages: 992-995
Development of capacitive RF MEMS switches with TaN and Ta2O5 thin films
Smart Sensors, Actuators, and MEMS V [SPIE], Volume: 8066 Pages: 259-264
High performance RF-MEMS SP4T switches in CPW technology for space applications
The 40th European Microwave Conference [IEEE], Pages: 89-92
35th International Conference on Infrared, Millimeter, and Terahertz Waves [IEEE], Pages: 1-2
Alternative materials for RF MEMS switches in III–V technology
2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP) [IEEE], Pages: 295-298
RF MEMS ohmic switches for matrix configurations
Proc. of MEMSWAVE 2010, Otranto, Italy [],
Second harmonic generation on non-linear composite right-/left-handed transmission line
2009 International Semiconductor Conference [IEEE], Volume: 1 Pages: 345-348
Distributed frequency doubler based on non-linear composite right-/left-handed cascaded cells
2009 European Microwave Conference (EuMC) [IEEE], Pages: 1303-1306
High performance RF-MEMS SP4T switches in CPW and microstrip technology
Proceedings of MEMSWAVE 2009 [],
2008 Asia-Pacific Microwave Conference [IEEE], Pages: 1-4
Circuital modelling of shunt capacitive RF MEMS switches
2008 European Microwave Integrated Circuit Conference [IEEE], Pages: 362-365
Alumina and LTCC technology for RF MEMS switches and true time delay lines
2008 European Microwave Integrated Circuit Conference [IEEE], Pages: 366-369
2008 International Semiconductor Conference [IEEE], Volume: 1 Pages: 223-226
Packaged single pole double thru (SPDT) and true time delay lines (TTDL) based on RF MEMS switches
2008 International Semiconductor Conference [IEEE], Volume: 1 Pages: 227-230
Technology and test of coplanar grounded wave-guides on micro-machined Si wafers
2008 International Semiconductor Conference [IEEE], Volume: 1 Pages: 219-222
Microwave antennas with CRLH cells on silicon substrate
2008 50th International Symposium ELMAR [IEEE], Volume: 1 Pages: 211-214
Microwave directional coupler with CRLH cells on silicon substrate
2008 50th International Symposium ELMAR [IEEE], Volume: 1 Pages: 195-198
MIKON 2008-17th International Conference on Microwaves, Radar and Wireless Communications [IEEE], Pages: 1-4
Silicon supported microwave zeroth-order resonance antenna on metamaterial approach
2007 Asia-Pacific Microwave Conference [IEEE], Pages: 1-4
Tecnological and design improvements for RF MEMS shunt switches
2007 International Semiconductor Conference [IEEE], Volume: 1 Pages: 263-266
Low Design of Micromachined Coplanar Grounded Wave-Guides
2007 International Semiconductor Conference [IEEE], Volume: 1 Pages: 271-274
Silicon Supported Microwave Directional Coupler Metamaterial Approach
2007 International Semiconductor Conference [IEEE], Volume: 1 Pages: 241-244
RF MEMS switches supported by polymeric structures
2007 International Semiconductor Conference [IEEE], Volume: 1 Pages: 259-262
Silicon resonating antenna based on CPW composite right/left-handed transmission line
2007 European Microwave Conference [IEEE], Pages: 478-481
CPW Antenna Fabricated on Silicon Substrate, Based on Transmission Line Metamaterial Approach
2007 International Conference on Electromagnetics in Advanced Applications [IEEE], Pages: 488-491
EUROCON 2007-The International Conference on" Computer as a Tool" [IEEE], Pages: 2073-2077
A low contact-resistance winged-bridge RF-MEMS series switch for wide-band applications
European Microwave Conference, 2007 [],
Fabrication of high performance RF-MEMS structures on surface planarised LTCC substrates
16th European Microelectronics and Packaging Conference and Exhibition 2007, EMPC 2007 [Curran Associates Inc.], Pages: 364-369
Optimisation of Cascaded Band Stop MSW Resonators using CPW Lines
2006 International Semiconductor Conference [IEEE], Volume: 1 Pages: 97-100
2006 European Microwave Integrated Circuits Conference [IEEE], Pages: 501-504
MEMS Based Tunable Band-Stop Structure
2006 International Conference on Microwaves, Radar & Wireless Communications [IEEE], Pages: 159-162
Design and characterization of a quasi-optical mixer fabricated using silicon micromachining
MELECON 2006-2006 IEEE Mediterranean Electrotechnical Conference [IEEE], Pages: 210-213
Transient Processes Influence on Magnetostatic Waves Soliton Propagation in Ferrite Films
2006 IEEE International Magnetics Conference (INTERMAG) [IEEE], Pages: 657-657
CPW magnetostatic wave band stop resonators
2005 European Microwave Conference [IEEE], Volume: 1 Pages: 4 pp.
Low loss coplanar lines on low resistivity silicon SU-S thick negative photoresist
CAS 2005 Proceedings. 2005 International Semiconductor Conference, 2005. [IEEE], Volume: 1 Pages: 107-110
Design of phase shifters based on RF MEMS shunt switches
CAS 2005 Proceedings. 2005 International Semiconductor Conference, 2005. [IEEE], Volume: 1 Pages: 103-106
Nano-and Micro-Metrology [SPIE], Volume: 5858 Pages: 312-320
Proceedings of 2005 IEEE/LEOS Workshop on Fibres and Optical Passive Components, 2005. [IEEE], Pages: 87-91
Design and Modelling of a RF MEMS Switch Matrix
GigaHertz Symposium [],
Journal of Cultural Heritage [Elsevier Masson], Volume: 67 Pages: 270-276
Sensors [MDPI], Volume: 24 Issue: 7 Pages: 2308
Equivalent Circuits for Microwave Metamaterial Planar Components
Sensors [MDPI], Volume: 24 Issue: 7 Pages: 2212
Coupled Micromachined Magnetic Resonators for Microwave Signal Processing
Micromachines [Multidisciplinary Digital Publishing Institute], Volume: 15 Issue: 2 Pages: 259
MEMS-Switched Triangular and U-Shaped Band-Stop Resonators for K-Band Operation
Sensors [MDPI], Volume: 23 Issue: 19 Pages: 8339
Triangular Sierpinski Microwave Band-Stop Resonators for K-Band Filtering
Sensors [MDPI], Volume: 23 Issue: 19 Pages: 8125
Metamaterials based RF microsystems for telecommunication applications
Ceramics International [Elsevier], Volume: 49 Issue: 14 Pages: 24379-24389
Sensors [MDPI], Volume: 23 Issue: 6 Pages: 3360
Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology
Sensors [MDPI], Volume: 23 Issue: 1 Pages: 466
Analysis of dielectric constant behavior of thermally treated SU-8 polymer up to 18 GHz
Materials Research Bulletin [Pergamon], Volume: 150 Pages: 111755
IEEE Transactions on Instrumentation and Measurement [IEEE], Volume: 71 Pages: 1-11
AIP Conference Proceedings [AIP Publishing], Volume: 2416 Issue: 1
AIP Conference Proceedings [AIP Publishing], Volume: 2416 Issue: 1
Amplitude and Phase Tuning of Microwave Signals in Magnetically Biased Permalloy Structures
IEEE Access [IEEE], Volume: 8 Pages: 190843-190854
Technical Physics [Pleiades Publishing], Volume: 64 Pages: 1629-1635
Zhurnal Tekhnicheskoi Fiziki [Ioffe Institute], Volume: 89 Issue: 11 Pages: 1719-1725
Fabrication and test of RF MEMS in LTCC technology
Microsystem Technologies [Springer Berlin Heidelberg], Volume: 24 Pages: 511-518
Wafer-level micropackaging in thin film technology for RF MEMS applications
Microsystem Technologies [Springer Berlin Heidelberg], Volume: 24 Pages: 575-585
Microsystem Technologies [Springer Berlin Heidelberg], Pages: 1-11
Microsystem Technologies [Springer Berlin Heidelberg], Volume: 23 Pages: 3955-3967
Cycling reliability of RF-MEMS switches with Gold–Platinum multilayers as contact material
Microsystem Technologies [Springer Berlin Heidelberg], Volume: 23 Pages: 3843-3850
Transmission microwave spectroscopy for local characterization of dielectric materials
Journal of Vacuum Science & Technology B [AIP Publishing], Volume: 35 Issue: 1
Scanning microwave microscopy technique for nanoscale characterization of magnetic materials
Journal of Magnetism and Magnetic Materials [North-Holland], Volume: 420 Pages: 62-69
Influence of design and fabrication on RF performance of capacitive RF MEMS switches
Microsystem Technologies [Springer Berlin Heidelberg], Volume: 22 Pages: 1741-1746
Microelectronic Engineering [Elsevier], Volume: 159 Pages: 64-69
A broadband toolbox for scanning microwave microscopy transmission measurements
Review of Scientific Instruments [AIP Publishing], Volume: 87 Issue: 5
Reliable response of RF MEMS LTCC packaged switches after mechanical and thermal stress
Microsystem Technologies [Springer Berlin Heidelberg], Volume: 22 Pages: 495-501
The Image Phase Approach for the Design of RF MEMS Shunt Switches
Progress In Electromagnetics Research C [EMW Publishing], Volume: 63 Pages: 173-182
Applied Physics Letters [AIP Publishing], Volume: 107 Issue: 22
Reliability of RF MEMS capacitive and ohmic switches for space redundancy configurations
Microsystem Technologies [Springer Berlin Heidelberg], Volume: 21 Pages: 1903-1913
Modeling of a metallic truncated cone for electromagnetic capacitive sensors
Journal of Applied Physics [AIP Publishing], Volume: 118 Issue: 7
Optimization of the imaging response of scanning microwave microscopy measurements
Applied Physics Letters [AIP Publishing], Volume: 107 Issue: 3
Quantitative sub-surface and non-contact imaging using scanning microwave microscopy
Nanotechnology [IOP Publishing], Volume: 26 Issue: 13 Pages: 135701
Analog Integrated Circuits and Signal Processing [Springer US], Volume: 82 Pages: 557-558
Neutron reflectometry studies of aluminum–saline water interface under hydrostatic pressure
Corrosion Science [Pergamon], Volume: 90 Pages: 101-106
Applied Physics Letters [AIP Publishing], Volume: 105 Issue: 13
Design of RF MEMS based switch matrix for space applications
Advances in Radio Science [Copernicus GmbH], Volume: 11 Issue: C. 7 Pages: 143-152
Design of single and coupled microwave meta-material resonators in microsystem technology
Analog Integrated Circuits and Signal Processing [Springer US], Volume: 75 Pages: 407-415
RF MEMS switches fabrication by using SU-8 technology
Microsystem technologies [Springer-Verlag], Volume: 19 Issue: 6 Pages: 929-936
Smoothing and surface planarization of sacrificial layers in MEMS technology
Microsystem technologies [Springer-Verlag], Volume: 19 Pages: 845-851
Design and Optimization of Microwave Triangular Meta-material Resonators in Coplanar Configuration
Advances in Science and Technology [Trans Tech Publications Ltd], Volume: 77 Pages: 231-236
RF MEMS ohmic switches for matrix configurations
International Journal of Microwave and Wireless Technologies [Cambridge University Press], Volume: 4 Issue: 4 Pages: 421-433
Analytic modeling of RF MEMS shunt connected capacitive switches
Journal of Electromagnetic Waves and Applications [Routledge], Volume: 26 Issue: 8-9 Pages: 1168-1179
Design and technology of micro-machined coplanar grounded wave-guides
IET microwaves, antennas & propagation [IET Digital Library], Volume: 6 Issue: 5 Pages: 497-504
Modulation instability in RF MEMS devices
Analog Integrated Circuits and Signal Processing [Springer US], Volume: 71 Pages: 59-67
Dynamics of RF micro-mechanical capacitive shunt switches in coplanar waveguide configuration
Microelectromechanical systems and devices [InTech], Volume: 10 Pages: 28251
Microwave inter-connections and switching by means of carbon nano-tubes
Nanomaterials and Nanotechnology [InTech], Volume: 1 Issue: 1 Pages: 64-77
Ta2O5 Thin Films for Capacitive RF MEMS Switches
Journal of Sensors [Hindawi], Volume: 2010
Mechanical modelling of capacitive RF MEMS shunt switches
Microsystem technologies [Springer-Verlag], Volume: 16 Pages: 1057-1064
Reliability of RF MEMS switches due to charging effects and their circuital modelling
Microsystem technologies [Springer-Verlag], Volume: 16 Pages: 1111-1118
Composite Right/Left Handed (CRLH) based devices for microwave applications
Advanced Microwave and Millimeter Wave Technologies: Semiconductor Devices Circuits and Systems [BoD–Books on Demand], Pages: 89-112
Frequency doubler based on non-linear composite right-/lefthanded cells
The Mediterranean Journal of Electronics and Communications [], Volume: 6 Issue: 3 Pages: 93-100
Dielectric charging in microwave microelectromechanical Ohmic series and capacitive shunt switches
Journal of Applied Physics [AIP Publishing], Volume: 105 Issue: 11
SCIENCE AND TECHNOLOGY [], Volume: 12 Issue: 3 Pages: 394-401
SU-8 based processes for the realization of RF MEMS structures
Proceedings 10th International Symposium on RF MEMS and RF Microsystems, Povo, Trento, Italy [], Pages: 93-96
SCIENCE AND TECHNOLOGY [], Volume: 12 Issue: 3 Pages: 283-307
Design Technology and Test of Micro-Machined Coplanar Grounded Wave-Guides on Si Substrates
SCIENCE AND TECHNOLOGY [], Volume: 12 Issue: 3 Pages: 366-375
Journal of Applied Physics [AIP Publishing], Volume: 104 Issue: 8
Microelectronic engineering [Elsevier], Volume: 85 Issue: 2 Pages: 425-431
Development of high con coff ratio RF MEMS shunt switches
Roman J Inf Sci Tech [], Volume: 11 Pages: 143-151
Proc. of Metamaterials 2008 [], Pages: 492-494
Realisation of distributed RF MEMS phase shifter with very low number of switches
Electronics Letters [IET Digital Library], Volume: 43 Issue: 23 Pages: 1290-1292
Small-size CPW silicon resonating antenna based on transmission-line meta-material approach
Electronics Letters [The Institution of Engineering & Technology], Volume: 43 Issue: 17 Pages: 1
Fabrication of RF-MEMS switches on LTCC substrates using PECVD a-Si as sacrificial layer
Microelectronic engineering [Elsevier], Volume: 84 Issue: 5-8 Pages: 1401-1404
YIG ferrite magnetostatic wave cascaded resonators
Journal of optoelectronics and advanced materials [INOE 2000], Volume: 9 Issue: 5 Pages: 1505-1507
CPW cascaded magnetostatic-wave bandstop resonators
IEEE transactions on magnetics [IEEE], Volume: 42 Issue: 10 Pages: 3347-3349
Magnetostatic surface wave bright soliton propagation in ferrite-dielectric-metal structures
IEEE transactions on magnetics [IEEE], Volume: 42 Issue: 7 Pages: 1785-1801
Propagation of magnetostatic waves in the form of rectangular pulses in YIG films
Technical physics [Nauka/Interperiodica], Volume: 51 Pages: 595-603
Accurate Design and Yield Analysis of Tunable Distributed MEMS Bandpass Filter
Proceedings of GEMiC2006 [],
Micromachined magnetostatic wave coupled resonators
IEEE transactions on magnetics [IEEE], Volume: 41 Issue: 10 Pages: 3502-3504
Experimental characterisation of 38 GHz micromachined GaAs receiver
Electronics Letters [The Institution of Engineering & Technology], Volume: 41 Issue: 5 Pages: 1
Microwave Imaging Applied to Noninvasive Diagnostic of Cultural Heritage Artworks
International Conference Florence Heri-Tech: the Future of Heritage Science and Technologies [Springer International Publishing], Pages: 392-400
Wafer-level thin film micropackaging for MEMS devices
Proc. of Sensing for Smart Anything Everywhere: Materials, Technologies, Applications (ISOCS-MiNaB-ICT-MNBS)) [ITA], Pages: 1-2
Reliability of RF-MEMS switches for space applications
9th ESA Round Table on Micro and Nano Technologies for Space Applications [],
Microelectromechanical Systems and Devices [InTech], Pages: 233-268
Microwave microsystems: Technology and modeling of RF MEMS switches and related applications
Advanced Techniques for Microwave Systems [Research Signpost], Pages: 181-204
Reliable RF microsystem technologies for space applications
Proceedings of the 11th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2010 [],
Characterization of MIM Capacitors for the Investigation of RF MEMS Switch Charging Effects
Proceedings of the 10th international Symposium on RF MEMS and RF Microsystems [FBK-Publishing services], Pages: 121-124
PHASE SHIFTERS BASED ON RF-MEMS COPLANAR SHUNT SWITCHES
Sensors And Microsystems [], Pages: 329-336
RF-MEMS COPLANAR SHUNT SWITCHES BASED ON SU-8 TECHNOLOGY
Sensors And Microsystems [], Pages: 321-328
Proceedings of MEMSWAVE 2008. 9th International Symposium on RF MEMS and RF Microsystems [],
RF MEMS reliability for space applications
Emerging Technologies for RF and Millimeter Waves Circuits [Editura Academiei Romane], Pages: 112-115
A low contact-resistance winged-bridge RF-MEMS series switch for wide-band applications
Journal of the European Microwave Association [Edizioni Plus-Università di Pisa], Volume: 3 Issue: 3 Pages: 268-278
Digital holographic microscope for dynamic characterization of a micromechanical shunt switch
Fringe 2005: The 5th International Workshop on Automatic Processing of Fringe Patterns [Springer Berlin Heidelberg], Pages: 662-666
Reliability and power handling issues in Ohmic series and shunt capacitive RF MEMS switches
MEMSWAVE2006 7th International Symposium on RF-MEMS and RF Microsystems [Romanian Academy], Issue: 10 Pages: 95-102
Microwave MEMS Switches in Series Configuration: Technology and Circuital Modeling
Sensors And Microsystems [], Pages: 351-355