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Surname: 
Mancarella
Firstname: 
Fulvio
Position: 
Staff
Profile: 
Researcher
Phone: 
+39 0516399120
Activity: 
Curriculum: 

Fulvio Mancarella received a M. Sc. degree in Electrical Engineering and a Ph. D. degree in Electronics and Computer Science in 2002 and 2006, respectively, both from Bologna University.
Since 2009 he joined the Institute of Microelectronics and Microsystems (IMM) of the Italian National Research Council (CNR) as a scientific researcher.
His research interests include technology development for the fabrication of micro-electro-mechanical systems (MEMS).
Since 2003 he has been working on the development of infrared thermoelectric transducers for the 3-5 µm atmospheric window fabricated with CMOS-compatible micromachining techniques in the framework of the EU project “NETGAS” (ST-2001-37802-FP5), aiming at the realization of a photoacoustic gas sensing microsystem based on heavly-dopped polysilicon.
Since January 2006, the activities for the development of sensors based on silicon microsystem has been working in the framework of the regional project (LaRIA). The activities have been focused on the development of deep silicon etching by Deep Reactive Ion Etching (D-RIE).
In the same period, he has been working on the fabrication of MEMS resonant strain sensors for structural monitoring applications in the framework of the EUROCORES "Micro-measurement and Monitoring System for Ageing Underground Infrastructures - Underground M3" project funded within S3T Programme (FP6), coordinated by the University of Cambridge.
Since 2007, he has been mainly working in several industrial research project funded by private companies, in the field of technology development for inkjet applications, separation system for micro gas chromatography and a feasibility study aiming at the realization of micro nozzles for biochemical application.
In 2010 he has been working in a feasibility study, funded by private company and in collaboration with Università degli Studi di Milano-Bicocca, aiming at the develop of silicon-based nanostructured thermoelectric devices for power harvesting application.
Since 2012 he has been working on the development of silicon photonics devices for DataCom application in the framework of FIRB project “MINOS” (Dispositivi fotonici micro- e nano-strutturati basati su silicio deformato per commutazione ultra-rapida in applicazioni datacom).
In the same period, he has been working of the fabrication of power microgeneration and storage devices, in the framework of European Project (FP7-NMP-2013-SMALL-7) ”SiNERGY” (Silicon friendly materials and device solutions for microenergy applications).

SKYPE ID: fulvio.mancarella

ORDID: https://orcid.org/0000-0002-1979-4387

Source: 
Bologna UNIT

Scientific Productions

Mariaconcetta Canino, Fulvio Mancarella, Filippo Bonafè, Franco Corticelli, Cristiano Albonetti, Roberta Nipoti

Mechanism Governing Surface Roughening of Al Ion Implanted 4H-SiC during Annealing under a C-Cap

Materials Science Forum [Trans Tech Publications Ltd], Volume: 1062 Pages: 235-240

R Viola, S Mengali, N Libetatore, S Zampolli, I Elmi, F Mancarella

Deployable Sensor for Trace Identification of Hazardous Chemicals in Dirty Environment, Based on FAST Gas-chromatography and Quartz Enhanced Photoacoustic Spectroscopy

2019 PhotonIcs & Electromagnetics Research Symposium-Spring (PIERS-Spring) [IEEE], Pages: 223-228

Diego Marini, Luca Belsito, Fulvio Mancarella, Filippo Bonafè, Alberto Roncaglia

Micro-Opto-Mechanical sensors for tactile width measurements of surface opening cracks in concrete

2017 IEEE SENSORS [IEEE], Pages: 1-3

GB Montanari, F Mancarella, R Balboni, D Marini, F Corticelli, M Sanmartin, M Ferri, G Bolognini

Induced strain in silicon waveguides and couplers

Silicon Photonics X [International Society for Optics and Photonics], Volume: 9367 Pages: 93671L

Roberta Nipoti, Francesco Moscatelli, Alberto Roncaglia, Filippo Bonafè, Fulvio Mancarella, Pietro De Nicola, Anindya Nath, Mulpuri V Rao

Ion Implanted Lateral p+-i-n+ Diodes on HPSI 4H-SiC

Materials Science Forum [Trans Tech Publications Ltd], Volume: 821 Pages: 620-623

D Marini, GB Montanari, F Mancarella, M Ferri, R Balboni, G Bolognini

Study of induced strain in silicon rib structures

11th International Conference on Group IV Photonics (GFP) [IEEE], Pages: 195-196

A Nath, Mulpuri V Rao, F Moscatelli, M Puzzanghera, F Mancarella, R Nipoti

Temperature dependent current-voltage characteristics of microwave annealed Al+ implanted 4H-SiC p+-in diodes

2014 20th International Conference on Ion Implantation Technology (IIT) [IEEE], Pages: 1-4

Nicola Andriolli, Isabella Cerutti, Paolo Pintus, Mirco Scaffardi, Diego Marini, Giovanni Battista Montanari, Fulvio Mancarella, Matteo Ferri, Roberto Balboni, Gabriele Bolognini

Challenges and progress toward a silicon-based multi-microring optical network-on-chip

2014 European Conference on Networks and Communications (EuCNC) [IEEE], Pages: 1-5

D Marini, GB Montanari, F Mancarella, M Ferri, R Balboni, G Bolognini

Lattice deformations in strained-silicon rib structures for photonic devices

2014 Fotonica AEIT Italian Conference on Photonics Technologies [IEEE], Pages: 1-3

Cecilia Lucia Cagliero, Uekane Thais, Galli Stefano, Galli Mario, Mancarella Fulvio, Elmi Ivan, Belluce Maddalena, Barbara Sgorbini, Patrizia Rubiolo, Carlo Bicchi

Conventional and Enantioselective GC microfabricated columns versus FSOT columns in the analysis of essential oils

45th International Symposium of Essential Oils (ISEO 2014) [], Volume: 1 Pages: 37-37

Luca Belsito, Matteo Ferri, Fulvio Mancarella, Alberto Roncaglia, Jize Yan, A Ashwin Seshia, Kenichi Soga

High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) [IEEE], Pages: 992-995

Simone Sugliani, Pietro De Nicola, Giovanni Battista Montanari, Alessio Nubile, Angela Menin, Fulvio Mancarella, Paolo Vergani, Andrea Meroni, Marco Astolfi, Marco Borsetto, Guido Consonni, Roberto Longone, Marco Chiarini, Marco Bianconi, Gian Giuseppe Bentini

High quality surface micromachining of LiNbO3 by ion implantation-assisted etching

Micromachining and Microfabrication Process Technology XVIII [International Society for Optics and Photonics], Volume: 8612 Pages: 86120E

Roberta Nipoti, A Nath, Mulpuri V Rao, Anders Hallén, F Mancarella, S Zampolli, YL Tian

High dose Al+ implanted and microwave annealed 4H-SiC

Materials Science Forum [Trans Tech Publications Ltd], Volume: 717 Pages: 817-820

Matteo Bosi, Giovanni Attolini, Bernard Enrico Watts, Alberto Roncaglia, Antonella Poggi, Fulvio Mancarella, Francesco Moscatelli, Luca Belsito, Matteo Ferri

Epitaxial Growth, Mechanical, Electrical Properties of SiC/Si and SiC/Poli-Si

Materials Science Forum [Trans Tech Publications Ltd], Volume: 717 Pages: 897-900

Matteo Ferri, Luca Belsito, Fulvio Mancarella, Luca Masini, Alberto Roncaglia, Jize Yan, A Ashwin Seshia, J Zalesky, K Soga

Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 1056-1059

L Belsito, F Mancarella, M Ferri, A Roncaglia, E Biagi, S Cerbai, L Masotti, G Masetti, N Speciale

Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 594-597

Roberta Nipoti, Fulvio Mancarella, Francesco Moscatelli, R Rizzoli, S Zampolli

Carbon-Cap for Ohmic Contacts on n-Type Ion Implanted 4H-SiC

Materials Science Forum [Trans Tech Publications Ltd], Volume: 679 Pages: 504-507

Bernard Enrico Watts, Giovanni Attolini, Francesca Rossi, Matteo Bosi, Giancarlo Salviati, Fulvio Mancarella, Matteo Ferri, Alberto Roncaglia, Antonella Poggi

β-SiC NWs grown on patterned and MEMS silicon substrates

Materials Science Forum [Trans Tech Publications Ltd], Volume: 679 Pages: 508-511

M Ferri, F Mancarella, J Yan, JE-Y Lee, AA Seshia, J Zalesky, K Soga, A Roncaglia

Design and prototyping of a MEMS-based crackmeter for structural monitoring

TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 315-318

Matteo Ferri, Fulvio Mancarella, Alberto Roncaglia, James Ransley, Jize Yan, Ashwin Seshia

Fabrication of DETF sensors in SOI technology with submicron air gaps using a maskless line narrowing technique

SENSORS, 2008 IEEE [IEEE], Pages: 1131-1134

Lucia Bissi, Pisana Placidi, Michele Cicioni, Andrea Scorzoni, Fulvio Mancarella, Stefano Zampolli

Direct detection of DNA sequences based on capacitance measurements through a configurable mixed-signal architecture

2008 15th IEEE International Conference on Electronics, Circuits and Systems [IEEE], Pages: 89-92

A Roncaglia, E Cozzani, F Mancarella, M Passini, GC Cardinali, M Severi

Influence of air heat exchange upon on-chip measurement of thermal conductivity using mems test structures

TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 615-618

E Cozzani, A Roncaglia, S Zampolli, I Elmi, F Mancarella, F Tamarri, GC Cardinali

Material properties measurement and numerical simulation for Characterization of ultra-low-power consumption hotplates

TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and Microsystems Conference [IEEE], Pages: 1661-1664

Alberto Roncaglia, Fulvio Mancarella, Michele Sanmartin, Ivan Elmi, Gian Carlo Cardinali, Maurizio Severi

Wafer-level measurement of thermal conductivity on thin films

SENSORS, 2006 IEEE [IEEE], Pages: 1239-1242

Fulvio Mancarella, Alberto Roncaglia, Fabrizio Tamarri, Ivan Elmi, Gian Carlo Cardinali, Maurizio Severi

A comparison among different technological processes for the fabrication of polysilicon-based thermoelectric transducers

SENSORS, 2006 IEEE [IEEE], Pages: 1235-1238

Fulvio Mancarella, Alberto Roncaglia, Mara Passini, Michele Sanmartin, Gian Carlo Cardinali, Maurizio Severi

Wafer-level testing of thermopile IR detectors

SENSORS, 2005 IEEE [IEEE], Pages: 4 pp.

Fulvio Mancarella, Alberto Roncaglia, Fabrizio Tamarri, Giulio Pizzochero, Gian Carlo Cardinali, F Severi

Fabrication of Pt-polysilicon thin-film thermopiles: A preliminary study

SENSORS, 2005 IEEE [IEEE], Pages: 1141-1144

M Agati, S Boninelli, C Calabretta, F Mancarella, M Mauceri, D Crippa, M Albani, R Bergamaschini, L Miglio, F La Via

Growth of thick [111]-oriented 3C-SiC films on T-shaped Si micropillars

Materials & Design [Elsevier], Pages: 109833

G Torrisi, A Locatelli, GS Mauro, M Bellettato, L Celona, F Mancarella, C De Angelis, G Sorbello

Design and Characterization of a Silicon W-Band Woodpile Photonic Crystal Waveguide

IEEE Microwave and Wireless Components Letters [IEEE], Volume: 30 Issue: 4 Pages: 347-350

Luca Belsito, Matteo Bosi, Fulvio Mancarella, Matteo Ferri, Alberto Roncaglia

Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators

Journal of Microelectromechanical Systems [IEEE], Volume: 29 Issue: 1 Pages: 117-128

Massimo Zimbone, Marcin Zielinski, Corrado Bongiorno, Cristiano Calabretta, Ruggero Anzalone, Silvia Scalese, Giuseppe Fisicaro, Antonino La Magna, Fulvio Mancarella, Francesco La Via

3C-SiC Growth on Inverted Silicon Pyramids Patterned Substrate

Materials [Multidisciplinary Digital Publishing Institute], Volume: 12 Issue: 20 Pages: 3407

Mojmír Meduňa, Thomas Kreiliger, Marco Mauceri, Marco Puglisi, Fulvio Mancarella, Francesco La Via, Danilo Crippa, Leo Miglio, Hans von Känel

X-Ray diffraction on stacking faults in 3C-SiC epitaxial microcrystals grown on patterned Si (001) wafers

Journal of Crystal Growth [North-Holland],

Francesco La Via, Fabrizio Roccaforte, Antonino La Magna, Roberta Nipoti, Fulvio Mancarella, Peter Wellman, Danilo Crippa, Marco Mauceri, Peter Ward, Leo Miglio, Marcin Zielinski, Adolf Schöner, Ahmed Nejim, Laura Vivani, Rositza Yakimova, Mikael Syväjärvi, Gregory Grosset, Frank Torregrosa, Michael Jennings, Philip A Mawby, Ruggero Anzalone, Salvatore Coffa, Hiroyuki Nagasawa, Mike Jennings

3C-SiС Hetero-Epitaxially Grown on Silicon Compliance Substrates and New 3C-SiС Substrates for Sustainable Wide-Band-Gap Power Devices (CHALLENGE)

Materials Science Forum [], Volume: 924 Pages: 913

Andrea Scaccabarozzi, Simona Binetti, Maurizio Acciarri, Giovanni Isella, Roberta Campesato, Gabriele Gori, Maria Cristina Casale, Fulvio Mancarella, Michael Noack, Hans von Känel, Leo Miglio

Integration of InGaP/GaAs/Ge triple‐junction solar cells on deeply patterned silicon substrates

Progress in Photovoltaics: Research and Applications [], Volume: 24 Issue: 10 Pages: 1368-1377

Luca Belsito, Fulvio Mancarella, Alberto Roncaglia

Fabrication of capacitive absolute pressure sensors by thin film vacuum encapsulation on SOI substrates

Journal of Micromechanics and Microengineering [IOP Publishing], Volume: 26 Issue: 9 Pages: 095018

Stefania Carapezzi, Antonio Castaldini, Fulvio Mancarella, Antonella Poggi, Anna Cavallini

Processing-Induced Electrically Active Defects in Black Silicon Nanowire Devices

ACS applied materials & interfaces [American Chemical Society], Volume: 8 Issue: 16 Pages: 10443-10450

F Capozzi, S Giordano, A Di Palma, V Spagnuolo, F De Nicola, P Adamo

Biomonitoring of atmospheric pollution by moss bags: Discriminating urban-rural structure in a fragmented landscape

Chemosphere [Pergamon], Volume: 149 Pages: 211-218

Luca Belsito, Matteo Ferri, Fulvio Mancarella, Luca Masini, Jize Yan, Ashwin A Seshia, Kenichi Soga, Alberto Roncaglia

Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators

Sensors and Actuators A: Physical [Elsevier], Volume: 239 Pages: 90-101

F Suriano, M Ferri, F Moscatelli, F Mancarella, L Belsito, S Solmi, A Roncaglia, Stefano Frabboni, Gian Carlo Gazzadi, D Narducci

Influence of grain size on the thermoelectric properties of polycrystalline silicon nanowires

Journal of Electronic Materials [Springer US], Volume: 44 Issue: 1 Pages: 371-376

Hans von Känel, Fabio Isa, Claudiu V Falub, Eszter Judit Barthazy, Elisabeth Müller Gubler, Daniel Chrastina, Giovanni Isella, Thomas Kreiliger, Alfonso Gonzalez Taboada, Mojmir Meduna, Rolf Kaufmann, Antonia Neels, Alex Dommann, Philippe Niedermann, Fulvio Mancarella, Marco Mauceri, Marco Puglisi, Danilo Crippa, Francesco La Via, Ruggero Anzalone, Nicolo Piluso, Roberto Bergamaschini, Anna Marzegalli, Leo Miglio

(Invited) Three-Dimensional Epitaxial Si1-XGex, Ge and SiC Crystals on Deeply Patterned Si Substrates

ECS Transactions [The Electrochemical Society], Volume: 64 Issue: 6 Pages: 631-648

L Belsito, E Vannacci, F Mancarella, M Ferri, GP Veronese, E Biagi, A Roncaglia

Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology

Journal of Micromechanics and Microengineering [IOP Publishing], Volume: 24 Issue: 8 Pages: 085003

E Vannacci, L Belsito, F Mancarella, M Ferri, GP Veronese, A Roncaglia, E Biagi

Miniaturized fiber-optic ultrasound probes for endoscopic tissue analysis by micro-opto-mechanical technology

Biomedical microdevices [Springer US], Volume: 16 Issue: 3 Pages: 415-426

Marco Sangermano, Alessandro Chiolerio, Giulio Paolo Veronese, Luca Ortolani, Rita Rizzoli, Fulvio Mancarella, Vittorio Morandi

Graphene–Epoxy Flexible Transparent Capacitor Obtained By Graphene–Polymer Transfer and UV‐Induced Bonding

Macromolecular rapid communications [], Volume: 35 Issue: 3 Pages: 355-359

T Kreiliger, CV Falub, H von Känel, F Isa, G Isella, M Salvalaglio, L Miglio, L Wewior, D Fuster, B Alén, M Richter, E Uccelli, P Niedermann, A Neels, A Dommann, F Mancarella

Strain relaxation of GaAs/Ge crystals on patterned Si substrates

Applied Physics Letters [], Volume: 104 Issue: 2

AG Taboada, T Kreiliger, CV Falub, F Isa, M Salvalaglio, L Wewior, D Fuster, M Richter, E Uccelli, P Niedermann, A Neels, F Mancarella, B Alén, L Miglio, A Dommann, Giovanni Isella, H von Känel

Strain relaxation of GaAs/Ge crystals on patterned Si substrates

Applied Physics Letters [American Institute of Physics], Volume: 104 Issue: 2 Pages: 022112

M Canino, C Summonte, M Allegrezza, Rimpy Shukla, IP Jain, M Bellettato, A Desalvo, F Mancarella, M Sanmartin, A Terrasi, P Löper, M Schnabel, S Janz

Identification and tackling of a parasitic surface compound in SiC and Si-rich carbide films

Materials Science and Engineering: B [Elsevier], Volume: 178 Issue: 9 Pages: 623-629

Dario Narducci, Gianfranco Cerofolini, Matteo Ferri, Francesco Suriano, Fulvio Mancarella, Luca Belsito, Sandro Solmi, Alberto Roncaglia

Phonon scattering enhancement in silicon nanolayers

Journal of materials science [Springer US], Volume: 48 Issue: 7 Pages: 2779-2784

Simone Sugliania, Pietro De Nicolaa, Giovanni Battista Montanaria, Alessio Nubilea, Angela Menina, Fulvio Mancarellab, Paolo Verganic, Andrea Meronic, Marco Astolfic, Marco Borsettoc, Guido Consonnic, Roberto Longonec, Marco Chiarinia, Marco Bianconia, Gian Giuseppe Bentinia

High quality surface micromachining of LiNbO3 by ion implantation-assisted etching

Proc. of SPIE Vol [], Volume: 8612 Pages: 86120E-1

A Nubile, A Poggi, E Cozzani, I Elmi, S Zampolli, M Messina, GC Cardinali, F Mancarella, M Belluce

A Novel Pneumatically Driven SU-8 Microvalve for High Speed Gas Chromatographic Applications

Proceedings NSTI-Nanotech [], Pages: 172-175

Roberta Nipoti, Fulvio Mancarella, Francesco Moscatelli, Rita Rizzoli, S Zampolli, M Ferri

Carbon-cap for ohmic contacts on ion-implanted 4H–SiC

Electrochemical and Solid State Letters [IOP Publishing], Volume: 13 Issue: 12 Pages: H432

S Zampolli, I Elmi, F Mancarella, M Messina, G Marra, E Cozzani, M Belluce, F Tamarri, M Sanmartin, GC Cardinali, M Severi

Micromachined gas calibration sources based on nanometric depth microchannels

Procedia Engineering [Elsevier], Volume: 5 Pages: 1344-1347

Matteo Ferri, Fulvio Mancarella, Ashwin Seshia, James Ransley, Kenichi Soga, Jan Zalesky, Alberto Roncaglia

Development of MEMS strain sensors for crack monitoring in ageing civil infrastructures

Smart Structures and Systems [], Volume: 6 Issue: 3 Pages: 225-238

Matteo Ferri, F Mancarell, Luca Belsito, Alberto Roncaglia, Jize Yan, Ashwin A Seshia, Kenichi Soga, J Zalesky

Strain sensing on steel surfaces using vacuum packaged MEMS resonators

Procedia Engineering [Elsevier], Volume: 5 Pages: 1426-1429

Matteo Bosi, Bernard E Watts, Giovanni Attolini, Claudio Ferrari, Cesare Frigeri, Giancarlo Salviati, Antonella Poggi, Fulvio Mancarella, Alberto Roncaglia, Oscar Martínez, Vanesa Hortelano

Growth and characterization of 3C-SiC films for micro electro mechanical systems (MEMS) applications

Crystal growth & design [American Chemical Society], Volume: 9 Issue: 11 Pages: 4852-4859

Matteo Bosi, Giovanni Attolini, Bernard E Watts, Cesare Frigeri, Francesca Rossi, Antonella Poggi, Alberto Roncaglia, Fulvio Mancarella, Oscar Martinez, Vanesa Hortelano

Strain Evaluation in SiC MEMS Test Structures

ECS Transactions [IOP Publishing], Volume: 25 Issue: 8 Pages: 1031

Matteo Ferri, Fulvio Mancarella, Ashwin Seshia, James Ransley, Kenichi Soga, Jan Zalesky, Alberto Roncaglia

Development of MEMS strain sensors for crack monitoring in ageing civil infrastructures

Smart Struct. Syst [], Volume: 6 Pages: 225-238

S Zampolli, I Elmi, F Mancarella, P Betti, E Dalcanale, GC Cardinali, M Severi

Real-time monitoring of sub-ppb concentrations of aromatic volatiles with a MEMS-enabled miniaturized gas-chromatograph

Sensors and Actuators B: Chemical [Elsevier], Volume: 141 Issue: 1 Pages: 322-328

I Elmi, S Zampolli, E Cozzani, F Mancarella, GC Cardinali

Development of ultra-low-power consumption MOX sensors with ppb-level VOC detection capabilities for emerging applications

Sensors and Actuators B: Chemical [Elsevier], Volume: 135 Issue: 1 Pages: 342-351

F MANCARELLA, A RONCAGLIA, S CRISTIANI

PROCESS DEPENDENCE OF DOPED POLYSILICON THERMAL CONDUCTIVITY FOR THERMAL MEMS

Proceedings of the 11th Italian Conference on Sensors and Microsystems, Lecce, Italy, 8-10 February 2006 [World Scientific], Pages: 267

A Roncaglia, F Mancarella, GC Cardinali

CMOS-compatible fabrication of thermopiles with high sensitivity in the 3–5μm atmospheric window

Sensors and Actuators B: Chemical [Elsevier], Volume: 125 Issue: 1 Pages: 214-223

Fulvio Mancarella, Alberto Roncaglia, Gian Carlo Cardinali

A measurement technique for thermoelectric power of CMOS layers at the wafer level

Sensors and Actuators A: Physical [Elsevier], Volume: 132 Issue: 1 Pages: 289-295

F MANCARELLA, A RONCAGLIA

FOR DIELECTRIC MEMBRANES USINGTMAH'

Sensors And Microsystems-Proceedings Of The 9th Italian Conference [World Scientific], Pages: 373

L Miglio, R Bergamaschini, S Bietti, E Bonera, E Grilli, M Guzzi, A Marzegalli, F Montalenti, F Pezzoli, M Salvalaglio, S Sanguinetti, A Scaccabarozzi, C Falub, F Isa, T Kreiliger, A Taboada, D Chrastina, I Frigerio, G Isella, M Meduna, L Wewior, D Fuster, B Alen, M Bollani, A Dommann, A Neels, P Niedermann, C Frigeri, J Fompeyrine, M Richter, E Uccelli, F Mancarella, H von Kanel

Epitaxial self-assembly of 3-D semiconductor structures on deeply patterned Si substrates at the microscale

Abstract book-International conference on quantum dots 2014 [],

M Ferri, F Suriano, F Mancarella, L Belsito, S Solmi, A Roncaglia, D Narducci, G Cerofolini

Fabrication and Thermoelectric Characterization of Surface-Micromachined Silicon Nanowires

2012 E-MRS Spring Meeting-Book of Abstracts [FR],

F MANCARELLA, A RONCAGLIA, M PASSINI, GC CARDINALI, M SEVERI

A COMPUTATIONALLY EFFICIENT MODEL FOR THERMAL SENSORS SIMULATION

Sensors And Microsystems [], Pages: 152-156

A RONCAGLIA, F MANCARELLA, GC CARDINALI, S CRISTIANI, M SANMARTIN, M SEVERI

WAFER-LEVEL MEASUREMENT OF THIN FILMS THERMOELECTRIC POWER

Sensors And Microsystems [], Pages: 578-583

F MANCARELLA, A RONCAGLIA, S CRISTIANI, GC CARDINALI, M SEVERI

PROCESS DEPENDENCE OF DOPED POLYSILICON THERMAL CONDUCTIVITY FOR THERMAL MEMS APPLICATIONS

Sensors And Microsystems [], Pages: 267-271

F MANCARELLA, A RONCAGLIA, GC CARDINALI, G PIZZOCHERO, S GUERRI, M SEVERI

HIGHLY SENSITIVE THERMOELECTRIC TRANSDUCERS WITH CMOS MATERIALS

Sensors And Microsystems [], Pages: 573-577

F MANCARELLA, A RONCAGLIA, GC CARDINALI, F TAMARRI, M PASSINI

AN OPTIMIZED FRONT-SIDE MICROMACHINING PROCESS FOR DIELECTRIC MEMBRANES USING TMAH

Sensors And Microsystems [], Pages: 374-378

Fulvio Mancarella, Ivan Elmi, Stefano Zampolli, Antonella Poggi, Giancarlo Cardinalli, Maddalena Belluce, Stefano Galli, Mario Galli, Filippo Baravelli

Method For Making A Silicon Separation Microcolumn For Chromatography Or Gas Chromatography

US20140138351 [],

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