^-A A ⁺A

Synthesis and Micro/Nano Fabrication

The Micro- and nano fabrication (MNF) network has the capacity to produce excellent scientific research and has the potential to support the various research activities starting from basic research up to applied research with high TRL.

The MNF-network has necessary expertise and state-of-the-art technological facilities (about 1400 m³ ISO 5-8 Clean Room and more than 170 equipment) distributed over 7 sites in Italy able to investigate and develope a wide set of processes covering the whole chain for the fabrication of

Micro and nano electronics
Photonic devices
MEMS and MOEMS

The network also has a strong application connotation, and is potentially capable of favoring and encouraging technology transfer to small, medium and large companies both in Italy and abroad. It is also able to support small and medium production.

MNF network is inside the Italian network of research infrastructures in the field of nanofabrication (It-Fab).

COORDINATOR: RITA RIZZOLI

OPTICAL AND LASER LITHOGRAPHY
	NEAR UV - OPTICAL CONTACT LITHOGRAPHY DEEP UV - OPTICAL CONTACT LITHOGRAPHY LASER LITHOGRAPHY For more details see the following links AGRATE BOLOGNA ROME NAPLES LECCE CATANIA HQ CATANIA
NANOLITHOGRAPHY AND NANOPROCESSING
	ELECTRON BEAM LITHOGRAPHY FOCUS ION BEAM and GIS (GAS INJECTION SYSTEM) SOFT NANOIMPRINT SOFT MASTER REPLICATION TOOLS For more details see the following links BOLOGNA NAPLES LECCE CATANIA HQ
GROWTH, DEPOSITION AND THERMAL PROCESSES
	LPCVD SYSTEM PVD SYSTEM ALD SYSTEM SPUTTERING & ELECTRON GUN ELECTRODEPOSITION PRINTING SYSTEM For more details see the following links AGRATE BOLOGNA ROME NAPLES LECCE CATANIA HQ CATANIA
WET AND DRY ETCHING
	METALS, SILICON, AND III-V MATERIALS DRY ETCHING ICP & BOSCH PROCESS for SILICON, GLASS, AND III-V MATERIALS SURFACE CLEANING For more details see the following links AGRATE BOLOGNA ROME NAPLES LECCE CATANIA HQ
MICROSYSTEM PROCESSES
	ICP AND DEEP-RIE ETCHING WAFER BONDING @ WAFER LEVEL TMAH/KOH WET ANISOTROPIC ETCHING THICK METAL FILM BAY ELECTROPLATING DEPOSITION For more details see the following links BOLOGNA CATANIA HQ
ION IMPLANTATION
	LOW AND MEDIUN ION INPLANTATION HIGH ENERGY ION IMPLANTANTION For more details see the following links BOLOGNA CATANIA HQ
METROLOGY, CONTROL AND ELECTRICAL CHARACTERIZATION
	SEMI-AUTOMATIC ELECTRICAL PROBE STATION OPTICAL AND MECHANICAL PROFILOMETER OPTICAL THICKENESS MEASUREMENT ELLIPSOMETER SCAN TUNNEL MICROSCOPY For more details see the following links AGRATE BOLOGNA ROME LECCE CATANIA HQ
PACKAGING
	MANUAL WIRE BONDER WAFER BONDER @ WAFER LEVEL HIGH PRECISION DICING SAW SCRUBBER For more details see the following links AGRATE BOLOGNA LECCE CATANIA HQ
SIMULATION AND DESIGN
	LAYOUT MASK DESIGN DEVICE AND PROCESS SIMULATION ION IMPLANTATION SIMULATION For more details see the following links AGRATE BOLOGNA ROME LECCE CATANIA HQ