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High energy implantation of medium-light elements such as oxygen and carbon was performed in X-cut LiNbO3 single crystals in order to prepare high quality optical waveguides. The compositional and damage profiles, obtained by exploiting the secondary ion mass spectrometry and Rutherford back-scattering techniques respectively, were correlated to the structural properties measured by the high resolution X-ray diffraction. This study evidences the development of tensile strain induced by the ion implantation that can contribute to the decrease of the ordinary refractive index variation through the photo-elastic effect.
Publication date: 
1 Oct 2005

GG Bentini, M Bianconi, A Cerutti, M Chiarini, G Pennestri, C Sada, N Argiolas, M Bazzan, P Mazzoldi, R Guzzi

Biblio References: 
Volume: 240 Issue: 1-2 Pages: 174-177
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms