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Gas sensors based on γ-Fe 2 O 3 and CoFe 2 O 4 nanoparticles (NPs) were prepared by Langmuir-Schaeffer deposition onto Al 2 O 3 and auxilliary Si substrates. NPs with the size of 6.4 nm (Fe 2 O 3 ) and 7.6 nm (CoFe 2 O 4 ) and polydispersity of 9 % were fabricated by chemical route. NP arrays were analyzed by GIXRD, SEM, TEM, DLS and ellipsometry. Fe 2 O 3 sensors show high response of 38 for 500 ppb of strongly oxidizing NO 2 . The response of CoFe 2 O 4 sensors is 10 at 5 ppm of NO 2 . Sensitivities are lower with reducing CO and acetone gases. After one year storage at room temperature, a 6 % decrease of response was found. The sensor sensitivities are discussed comparing with the best published results so far.
Publication date: 
20 Oct 2014

Š Luby, M Jergel, M Benkovičová, P Siffalovič, J Ivančo, K Vegsö, E Majková, R Rella, MG Manera, S Capone, I Vávra

Biblio References: 
Pages: 1-4
The Tenth International Conference on Advanced Semiconductor Devices and Microsystems