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The outgrowth formation in inorganic thin films is a dramatic problem that has limited the technological impact of many techniques and materials. Outgrowths are often themselves part of the films, but are detrimental for vertical junctions since they cause short-circuits or work as defects, compromising the reproducibility and in some cases the operation of the corresponding devices. The problem of outgrowth is particularly relevant in ablation-based methods and in some complex oxides, but is present in a large variety of systems and techniques. Here we propose an efficient local electrochemical method to selectively decompose the outgrowths of conductive oxide thin films by electrochemical decomposition, without altering the properties of the background film. The process is carried out using the same set-up as for local oxidation nanolithography, except for the sign of the voltage bias and it works at the nanoscale …
Nature Publishing Group
Publication date: 
10 Dec 2014

Massimiliano Cavallini, Patrizio Graziosi, Marco Calbucci, Denis Gentili, Raimondo Cecchini, Marianna Barbalinardo, Ilaria Bergenti, Alberto Riminucci, Valentin Dediu

Biblio References: 
Volume: 4 Issue: 1 Pages: 1-4
Scientific reports