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The authors report a scalable process to fabricate electrically tunable light-emitting photonic structures made of optically active and electrically conductive erbium-doped zinc oxide (Er:ZnO) deposited by magnetron sputtering. Such structures are expected to produce a dramatic amplification of the erbium fluorescence due to enhanced light-matter coupling at topologically protected states called bound states in the continuum (BIC). Our patterning approach circumvents roughening of the Er:ZnO during plasma etching by employing a metallic mask and a lift-off process. Etching with a polymer mask resulted in an unacceptable increase of the surface roughness, from a root mean square (RMS) roughness of 0.5 nm for the as-deposited sample to a RMS roughness of 25 nm after etching. Such surface roughness proves detrimental to the photonic crystal resonances and to the BIC mode in particular. Using a metallic …
American Vacuum Society
Publication date: 
14 Nov 2017

Erika Penzo, Silvia Romano, Yu Wang, Scott Dhuey, Luca Dal Negro, Vito Mocella, Stefano Cabrini

Biblio References: 
Volume: 35 Issue: 6 Pages: 06G401
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena