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Process for physical vapor deposition of a chalcogenide material layer and chamber for physical vapor deposition of a chalcogenide material layer of a phase change memory device

Maria Marangon, Paola Besana, Raimondo Cecchini, Mauro Tresoldi

2006-04-05

Biblio references:

Origin: US20060249369
Micro silicon fuel cell, method of fabrication and self-powered semiconductor device integrating a micro fuel cell

Giuseppe D'arrigo, Salvatore Coffa, Rosario Corrado Spinella, , Rosario Corrado Spinella

2005-11-29

Biblio references:

Origin: US6969664
Process for manufacturing a Schottky contact on a semiconductor substrate

Fabrizio Roccaforte, Vito Raineri, Francesco La Via, Mario Saggio, , Mario Saggio

2005-09-27

Biblio references:

Origin: US20060183267
High-gain photodetector with separated PN junction and rare earth doped region and a method of forming the same

Salvatore Coffa, Sebania Libertino, Ferruccio Frisina, , Ferruccio Frisina

2005-09-13

Biblio references:

Origin: US6943390

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