Type:
Journal
Description:
Gas sensors research moves nowadays towards new applications of traditional metal oxide gas sensors into new fields like food quality, security applications and combustion control. Besides an implementation of this kind of transducers requires often a reduction of sensor dimensions, introduction of mature silicon technology substrates and fabrication methods. This work focuses on results obtained about implementation of reliable, selective, subtractive processes to perform high resolution patterning of different metal oxide films …
Publisher:
Elsevier
Publication date:
24 Nov 2006
Biblio References:
Volume: 119 Issue: 1 Pages: 159-166
Origin:
Sensors and Actuators B: Chemical