Scanning Transmission Electron Microscope (STEM), using High Angle Annular Dark Field (HAADF) detectors is a powerful technique for material characterisation. In high voltage STEM (200–300kV), the probe size that defines spatial resolution has atomic size, while in low voltage approach (20–30kV) the probe is larger. In this latter case channelling effects are reduced and the specimen response will be more directly interpretable as due to mass-thickness contrast.
Springer, Berlin, Heidelberg
1 Jan 2008
EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany