Alexei N Nazarov, Volodymyr O Yukhymchuk, Yurii V Gomeniuk, Sergiy B Kryvyi, Pavel N Okholin, Petro M Lytvyn, Vasyl P Kladko, Volodymyr S Lysenko, Volodymyr I Glotov, Illya E Golentus, Enrico Napolitani, Ray Duffy
Biblio references: Volume: 35 Issue: 5 Pages: 051203
Origin: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena