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Flexible sensors are gaining increasing interest in a number of applications, including biomedical, food control, domotics and robotics, having very light weight, robustness and low cost. In order to improve signal-to-noise ratio, integration of readout electronics is crucial and several technologies are available for the fabrication of thin film transistor (TFTs) based circuits on flexible substrates. Among these technologies, the low temperature polycrystalline silicon (LTPS) is particularly attractive, since LTPS TFTs show excellent electrical characteristics, good stability and offer the possibility to exploit CMOS architectures. The different aspects for the direct fabrication of LTPS TFTs on polymer substrates are reviewed and the specific fabrication process adopted on ultrathin polyimide (PI) substrates is described in some detail. In particular, LTPS TFTs were fabricated on ultra-thin PI substrates, deposited by spin-coating on …
IOP Publishing
Publication date: 
5 Aug 2014

Guglielmo Fortunato, Luca Maiolo, Francesco Maita, Antonio Minotti, Salvo Mirabella, Vicky Strano, Giorgio Metta, Davide Ricci, Alessandro Pecora

Biblio References: 
Issue: 47 Pages: 1931
ECS Meeting Abstracts