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We systematically investigated, both theoretically and experimentally, Zr1−xFexO2−y ranging from diluted (x ≈ 0.05) up to large (x ≈ 0.25) Fe concentration. By atomic layer deposition, we grew thin films of high-κ zirconia in cubic phase with Fe uniformly distributed in the film, as proven by time of flight secondary ion mass spectrometry and transmission electron microscopy measurements. Iron is in Fe3+ oxidation state suggesting the formation of oxygen vacancies with y concentration close to x/2. By ab-initio simulations, we studied the phase diagram relating the stability of monoclinic vs. tetragonal phase as a function of Fe doping and film thickness: the critical thickness at which the pure zirconia is stabilized in the tetragonal phase is estimated ranging from 2 to 6 nm according to film morphology. Preliminary results by X-ray magnetic circular dichroism and alternating gradient force magnetometry are …
American Institute of Physics
Publication date: 
7 May 2014

A Debernardi, D Sangalli, A Lamperti, E Cianci, P Lupo, F Casoli, F Albertini, L Nasi, R Ciprian, P Torelli

Biblio References: 
Volume: 115 Issue: 17 Pages: 17D718
Journal of Applied Physics