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We present a numerical model aimed to accurately simulate the plasma immersion ion implantation (PIII) process in micro and nano‐patterned Si samples. The code, based on the Monte Carlo approach, is designed to reproduce all the relevant physical phenomena involved in the process. The particle based simulation technique is fundamental to efficiently compute the material modifications promoted by the plasma implantation at the atomic resolution. The accuracy in the description of the process kinetic is achieved linking (one to one) each virtual Monte Carlo event to each possible atomic phenomenon (e.g. ion penetration, neutral absorption, ion induced surface modification, etc.). The code is designed to be coupled with a generic plasma status, characterized by the particle types (ions and neutrals), their flow rates and their energy/angle distributions. The coupling with a Poisson solver allows the simulation …
Publication date: 
1 Jan 2014

Antonino La Magna, Giuseppe Fisicaro, Giuseppe Nicotra, Yohann Spiegel, Frank Torregrosa

Biblio References: 
Volume: 11 Issue: 1 Pages: 109-112
physica status solidi (c)