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In this paper a double axis planar micro-Fluxgate magnetic sensor is presented. The ferromagnetic core material, the Vitrovac 6025 X, has been deposited on top of the coils with the DC-magnetron sputtering technique, a new type of procedure with respect the existing solutions in the field of Fluxgate sensor. This procedure allows us to obtain a core with the good magnetic properties of the amorphous ferromagnetic material, typical of a core 25 μm thick, but with a thickness of only 1 μm, typical of a core electrodepositcd. The micro-Fluxgate has been realized in a 0.5 μm CMOS process using copper metal lines to realize the excitation coil and aluminium metal lines for the sensing coils. Applying a triangular excitation current of 18 mA peak at 100 kHz the magnetic sensitivity achieved is about 0.45 mV/μT, suitable for detecting the Earth's magnetic field (±50 μT), while the linearity error is 1.15% of the full scale. The …
Publication date: 
1 Jan 2008

Andrea Baschirotto, Enrico Melissano, Pietro Siciliano, Enrico Dallago, Piero Malcovati, Marco Marchesi, Giuseppe Venchi

Biblio References: 
Pages: 127-131
Sensors And Microsystems