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The diffusion of B atoms in crystalline and amorphous Si has been experimentally investigated and modeled, evidencing the indirect mechanism of these mass transport phenomena. The migration of B occurs after interaction with self-interstitials in crystalline Si (c-Si) or with dangling bonds in amorphous Si (a-Si). In the first case, an accurate experimental design and a proper modeling allowed to determine the microscopic diffusion parameters as the B-defect interaction rate, the reaction paths leading to the diffusing species and its migration length. Moreover, by changing the Fermi level position, B atoms are shown to interact preferentially with neutral or doubly positively charged self-interstitials. As far as the amorphous case is concerned, B diffusion is revealed to have a marked transient character and to depend on the B concentration itself. In particular, boron atoms can move after the interaction with dangling …
Cambridge University Press
Publication date: 
1 Jan 2008

Salvo Mirabella, Davide De Salvador, Enrico Napolitani, Elena Bruno, Giuliana Impellizzeri, Gabriele Bisognin, Emanuele Francesco Pecora, Alberto Carnera, Francesco Priolo

Biblio References: 
Volume: 1070
MRS Online Proceedings Library (OPL)