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This work takes into account low Al implanted concentrations of 3 x 10 18 cm-3 and 1 x 10 19 cm-3 to compare the results of 1600 C and 1950 C post-implantation annealing treatments, done with two different annealing times per given implanted Al concentration and post implantation annealing temperature. Current-voltage and Hall effect measurements were performed to have the drift hole density and the drift hole mobility curves in the temperature range 100-650 K. The fitting of these curves in the frame of a carrier transport into the extended states of the valence band were performed to estimate the Al acceptor density, the donor compensator density, and the Al acceptor ionization energy. Peculiar feature of hole density and hole mobility curves is a contemporaneous increase of both carrier density and mobility values with increasing annealing time, which is congruent with the output parameters of the fitting …
Trans Tech Publications Ltd
Publication date: 
1 Jan 2020

Roberta Nipoti, Antonella Parisini, Virginia Boldrini, Salvatore Vantaggio, Mariaconcetta Canino, Michele Sanmartin, Giovanni Alfieri

Biblio References: 
Volume: 1004 Pages: 683-688
Materials Science Forum