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Gallium nitride (GaN) and its AlGaN/GaN heterostructures grown on large area Si substrates are promising systems to fabricate power devices inside the existing Si CMOS lines. For this purpose, however, Au-free metallizations are required to avoid cross contaminations. In this paper, the mechanisms of current transport in Au-free metallization on AlGaN/GaN heterostructures are studied, with a focus on non-recessed Ti/Al/Ti Ohmic contacts. In particular, an Ohmic behavior of Ti/Al/Ti stacks was observed after an annealing at moderate temperature (600 C). The values of the specific contact resistance ρ c decreased from 1.6× 10 4 Ω. cm 2 to 7× 10 5 Ω. cm 2 with increasing the annealing time from 60 to 180s. The temperature dependence of ρ c indicated that the current flow is ruled by a thermionic field emission (TFE) mechanism, with barrier height values of 0.58 eV and 0.52 eV, respectively. Finally, preliminary …
Trans Tech Publications Ltd
Publication date: 
1 Jan 2020
Biblio References: 
Volume: 1004 Pages: 725-730
Materials Science Forum