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Smooth 200 nm thick N-polar InGaN films were grown by metal–organic chemical vapor deposition (MOCVD) on sapphire using a digital approach consisting of a constant In, Ga, and N precursor flow with pulsed injection of H2 into the N2 carrier gas. Using this growth scheme, the H2 injection time was altered and the effect on the morphology and indium incorporation in the films observed. The effect of periodic insertion of additional GaN inter-layers on the surface morphology of the InGaN layers was also studied.
Springer US
Publication date: 
17 Dec 2019

Shubhra S Pasayat, Cory Lund, Yusuke Tsukada, Massimo Catalano, Luhua Wang, Moon J Kim, Shuji Nakamura, Stacia Keller, Umesh K Mishra

Biblio References: 
Pages: 1-5
Journal of Electronic Materials