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This paper reports on the electrical activation and Ohmic contact properties on p-type Al-implanted silicon carbide (4H-SiC). In particular, the contacts were formed on 4H-SiC-implanted layers, subjected to three different post-implantation annealing processes, at 1675 C, 1175 C, and 1825 C. Under these post-implantation annealing conditions, the electrical activation of the Al dopant species increased from 39% to 56%. The Ti/Al/Ni contacts showed an Ohmic behavior after annealing at 950 C. The specific contact resistance ρ c could be lowered by a factor of 2.6 with the increase of the post-implantation annealing temperature. The result can be useful for application in device fabrication. Moreover, the dependence of ρ c on the active acceptor concentration followed the thermionic field emission model, with a barrier height of 0.63 eV. View Full-Text
Multidisciplinary Digital Publishing Institute
Publication date: 
1 Jan 2019

Monia Spera, Giuseppe Greco, Domenico Corso, Salvatore Di Franco, Andrea Severino, Angelo Alberto Messina, Filippo Giannazzo, Fabrizio Roccaforte

Biblio References: 
Volume: 12 Issue: 21 Pages: 3468