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Silicon and Column IV Semiconductor Devices-Investigation of Strain Engineering in FinFETs Comprising Experimental Analysis and Numerical Simulations

Type: 
Journal
Description: 
Publisher: 
Publication date: 
1 Jan 2011
Authors: 

F Conzatti, N Serra, D Esseni, M De Michielis, A Paussa, P Palestri, L Selmi, SM Thomas, TE Whall, D Leadley, EHC Parker, L Witters, MJ Hÿtch, E Snoeck, TJ Wang, WC Lee, G Doornbos, G Vellianitis, MJH van Dal, RJP Lander

Biblio References: 
Volume: 58 Issue: 6 Pages: 1583
Origin: 
IEEE Transactions on Electron Devices
Link: 
http://scholar.google.com/scholar?cluster=2875770013261616190&hl=en&oi=scholarr

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