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This paper is a report on Ohmic contacts on n-type and p-type type cubic silicon carbide (3C-SiC) layers grown on silicon substrates. In particular, the morphological, electrical and structural properties of annealed Ni and Ti/Al/Ni contacts has been studied employing several characterization techniques. Ni films annealed at 950 °C form Ohmic contacts on moderately n-type doped 3C-SiC (ND ~1 × 1017 cm−3), with a specific contact resistance of 3.7 × 10−3 Ω cm2. The main phase formed upon annealing in this contact was nickel silicide (Ni2Si), with randomly dispersed carbon in the reacted layer. In the case of a p-type 3C-SiC with a high doping level (NA ~5 × 1019 cm−3), Ti/Al/Ni contacts were preferable to Ni ones, as they gave much lower values of the specific contact resistance (1.8 × 10−5 Ω cm2). Here, an Al3Ni2 layer was formed in the uppermost part of the contact, while TiC was detected at the …
Publication date: 
1 Apr 2019
Biblio References: 
Volume: 93 Pages: 295-298
Materials Science in Semiconductor Processing