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This work reports on the effect of high temperature annealing on the electrical properties of p-type implanted 4H-SiC. Ion implantations of Aluminum (Al) at different energies (30–200 keV) were carried out to achieve 300 nm thick acceptor box profiles with a concentration of about 1020 at/cm3. The implanted samples were annealed at high temperatures (1675–1825 °C). Morphological analyses of the annealed samples revealed only a slight increase of the surface roughness RMS up to 1775 °C, while this increase becomes more significant at 1825 °C (RMS = 1.2 nm). Room temperature Hall measurements resulted in a hole concentration in the range 0.65–1.34 × 1018/cm3 and mobility values in the order of 21–27 cm2 V−1 s−1. The temperature dependent electrical measurements allowed to estimate an activation energy of the Al-implanted specie of about 110 meV (for the post-implantation …
Publication date: 
1 Apr 2019

Monia Spera, Domenico Corso, Salvatore Di Franco, Giuseppe Greco, Andrea Severino, Patrick Fiorenza, Filippo Giannazzo, Fabrizio Roccaforte

Biblio References: 
Volume: 93 Pages: 274-279
Materials Science in Semiconductor Processing