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Triangular resonators, designed by using Radio Frequency Micro Electro Mechanical Systems (RF MEMS) cantilevers in coplanar waveguide (CPW) configuration, have been proposed, fabricated on alumina and on silicon substrates and tested up to 40 GHz. They can be utilized as building blocks for realizing reconfigurable filters. A triangular split ring resonator has been etched in the central conductor of the CPW transmission line and the split is provided by the presence of a technologically actuated cantilever beam, i.e. with metal directly deposited without the sacrificial layer, to emulate the ideal actuation and to get preliminary information of the expected microwave response in comparison to numerical simulations. Two main configurations of the triangular transmission line have been studied for narrow-band microwave switching, the first one without the MEMS cantilever and the second one with a …
Springer Berlin Heidelberg
Publication date: 
1 Sep 2017

Andrea Lucibello, Emanuela Proietti, Romolo Marcelli, Giovanni Maria Sardi, Giancarlo Bartolucci

Biblio References: 
Volume: 23 Pages: 3955-3967
Microsystem Technologies