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Metal contacts (Schottky or Ohmic) to p‐type wide band gap (WBG) semiconductors SiC and GaN are important for power devices technologies. This work reports on the properties of Ti/Al‐based contacts to p‐type 4H‐SiC and p‐type GaN, monitored using different techniques and test‐patterns. In particular, in the case of p‐type SiC, Ti/Al and Ti/Al/W contacts showed a superior Ohmic behavior after annealing at 900–1100 °C (with ρc ≈ 1.5–6 × 10−4 Ωcm2), attributed to the formation of Ti‐ and Al‐containing phases at the interface and in the stack. Due to the lower ρc with respect to Ni‐based contacts, Ti/Al allowed a reduction of the forward voltage drop in 4H‐SiC p–n junctions. On the other hand, in the case of p‐type GaN, Ti/Al contacts exhibited a higher barrier height (2.08 eV) with respect to Ni contacts. Hence, they can be promising as Schottky gates in high electron mobility transistors (HEMTs …
Publication date: 
1 Apr 2017

F Roccaforte, M Vivona, G Greco, R Lo Nigro, F Giannazzo, S Di Franco, C Bongiorno, F Iucolano, A Frazzetto, S Rascunà, A Patti, M Saggio

Biblio References: 
Volume: 214 Issue: 4 Pages: 1600357
physica status solidi (a)