Type:
Journal
Description:
3. ResultsFigs. 2 show, respectively, the measured 100 etch rate (A) and underetch rates (B)-(C), for two different TMAH dilutions in water, namely 25% and 20% in
Publisher:
World Scientific
Publication date:
23 Jun 2005
Biblio References:
Pages: 373
Origin:
Sensors And Microsystems-Proceedings Of The 9th Italian Conference