In this work, structural, morphological, electrical and optical properties of oxide nanowires, employed as active material for gas sensing devices, have been investigated. The reactive metal oxides were deposited by vapour phase condensation process from pure oxide powders on the polished alumina and silicon substrates. For the electrical characterization platinum was deposited as electrodes and a platinum meander was prepared to control the operating temperature. The samples were investigated by electron microscopy techniques.The sensing performance of the prepared devices has been investigated as a function of temperature and concentration of carbon monoxide and nitrogen dioxide.
1 Jan 2008
Sensors And Microsystems