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A new Micro-Opto-Mechanical System (MOMS) probe on optical fiber is presented. High miniaturization levels are reached in the MOMS devices (fiber-optic emitters and detectors with minimum diameter around 350 and 250 µm respectively). The transmitting element consists of an optical fiber with a graphite-compound absorbent layer on the tip. The receiving element is an extrinsic fiber hydrophone based on a Fabry-Perot interferometer, the thickness of which is modulated by ultrasonic signals. The possibility to use optoacoustic sources in conjunction with the fiber-optic acousto-optical detectors within a minimally invasive probe is demonstrated by successfully measuring the ultrasonic echo reflected from a fingerprint made of cornstarch flour and from a silicon substrate with micrometric machining. The ultra-wide bandwidth and the high frequencies allowed by photoacoustic generation, in conjunction …
Springer, Cham
Publication date: 
1 Jan 2015

Enrico Vannacci, Simona Granchi, Elena Biagi, Luca Belsito, Alberto Roncaglia

Biblio References: 
Pages: 349-353