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Micro and nanotechnologies are called to play a key role in the fabrication of small and low cost sensors with excellent performance enabling new continuous monitoring scenarios and distributed intelligence paradigms (Internet of Things, Trillion Sensors). Harvesting devices providing energy autonomy to those large numbers of microsensors will be essential. In those scenarios where waste heat sources are present, thermoelectricity will be the obvious choice. However, miniaturization of state of the art thermoelectric modules is not easy with the current technologies used for their fabrication. Micro and nanotechnologies offer an interesting alternative considering that silicon in nanowire form is a material with a promising thermoelectric figure of merit. This paper presents two approaches for the integration of large numbers of silicon nanowires in a cost-effective and practical way using only micromachining and thin …
IOP Publishing
Publication date: 
30 Jun 2016

Luis Fonseca, Jose-Domingo Santos, Alberto Roncaglia, Dario Narducci, Carlos Calaza, Marc Salleras, Inci Donmez, Albert Tarancon, Alex Morata, Gerard Gadea, Luca Belsito, Laura Zulian

Biblio References: 
Volume: 31 Issue: 8 Pages: 084001
Semiconductor Science and Technology