Type:
Conference
Description:
We propose a comparison among different solutions for realizing polysilicon thermoelectric transducers, with five different types of thermoelements based on Al/polysilicon and two level polysilicon design, using different doping (of p and n-type) for the poly layers. The device performances are evaluated on a test geometry with electrical measurements and the performance obtained with the various solutions are compared.
Publisher:
IEEE
Publication date:
22 Oct 2006
Biblio References:
Pages: 1235-1238
Origin:
SENSORS, 2006 IEEE