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Article PreviewArticle PreviewArticle PreviewThis paper reports on the macro-and nanoscale electro-structural evolution, as a function of annealing temperature, of nickel-silicide Ohmic contacts to 3C-SiC, grown on 6H-SiC substrates by a Vapor-Liquid-Solid (VLS) technique. The structural and electrical characterization of the contacts, carried out by combining different techniques, showed a correlation between the annealing temperature and the electrical characteristics in both the macro-and the nanoscale measurements. Increasing the annealing temperature between 600 and 950 C caused a gradual increase of the uniformity of the nanoscale current-distribution, with an accompanying reduction of the specific contact resistance from 5 x 10-5 to 8.4 x 10-6 Ωcm2. After high temperature annealing (950 C) the structural composition of the contacts stabilized, as only the Ni2Si phase was detected. A comparison with …
Trans Tech Publications Ltd
Publication date: 
1 Jan 2009

Jens Eriksson, Fabrizio Roccaforte, Filippo Giannazzo, Raffaella Lo Nigro, Giuseppe Moschetti, Vito Raineri, Jean Lorenzzi, Gabriel Ferro

Biblio References: 
Volume: 615 Pages: 569-572
Materials Science Forum