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The evolution of the electrically active acceptor profiles and of the surface morphology in 4H-SiC implanted with multiple energy (from 550 to 40 keV) Al ions was investigated by the combined use of scanning capacitance microscopy (SCM) and atomic force microscopy (AFM), depending on the post-implantation annealing conditions at temperatures from 1400 degC to 1650 degC in Ar or Ar+SiH 4 ambient. Medium Al concentrations (10 17- 10 18 cm macr 3 ) were used to obtain uniformly doped p-well regions for n-channel MOSFETs applications, and the annealing conditions (temperature, furnace ramp rate, annealing ambient) were optimised to achieve a surface roughness compatible with the device channel region. For the lowest annealing temperature, a peculiar shape of the acceptor profile was observed, with a lack of electrically active Al in the surface region and with two peaks corresponding to the …
Publication date: 
2 Oct 2007

F Giannazzo, F Roccaforte, V Raineri, D Salinas

Biblio References: 
Pages: 71-73
2007 15th International Conference on Advanced Thermal Processing of Semiconductors