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Digital holography (DH) is a well-established interferometric tool in optical metrology allowing the investigation of engineered surface shapes with microscale lateral resolution and nanoscale axial precision. With the advent of charged coupled devices (CCDs) with smaller pixel sizes, high speed computers and greater pixel numbers, DH became a very feasible technology which offers new possibilities for a large variety of applications. DH presents numerous advantages such as the direct access to the phase information, numerical correction of optical aberrations and the ability of a numerical refocusing from a single hologram. Furthermore, as an interferometric method, DH offers both a nodestructive and no-contact approach to very fragile objects combined with flexibility and a high sensitivity to geometric quantities such as thicknesses and displacements. These features recommend it for the solution of many …
International Society for Optics and Photonics
Publication date: 
1 May 2014

Marcella Matrecano, Lisa Miccio, Anna Persano, Fabio Quaranta, Pietro Siciliano, Pietro Ferraro

Biblio References: 
Volume: 9132 Pages: 91321H
Optical Micro-and Nanometrology V