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Type: 
Journal
Description: 
Sensors miniaturization is one of the main topics in research, to have faster measurements and smaller portable devices. Integration with silicon technology has been investigated in order to have microdimensioned sensors; different geometries in sensors structure are under investigation to improve their performances. Capability of mature silicon fabrication technique will allow implementation of different structural layer and metal thin films, to investigate influence of different materials.
Publisher: 
Publication date: 
1 Sep 2005
Authors: 

G Verrelli, L Francioso, R Paolesse, P Siciliano, C Di Natale, A D’Amico

Biblio References: 
Volume: 19 Pages: 11-14
Origin: 
Proc. of EUROSENSORS